发明授权
US06187379B1 Fluidized bed coating process with liquid reagent 失效
流化床涂层工艺用液体试剂

  • 专利标题: Fluidized bed coating process with liquid reagent
  • 专利标题(中): 流化床涂层工艺用液体试剂
  • 申请号: US08835584
    申请日: 1997-04-09
  • 公开(公告)号: US06187379B1
    公开(公告)日: 2001-02-13
  • 发明人: Walter J. Lackey
  • 申请人: Walter J. Lackey
  • 主分类号: C23C1600
  • IPC分类号: C23C1600
Fluidized bed coating process with liquid reagent
摘要:
A preferred embodiment of a method for coating a substrate with a chemical compound uses a precursor liquid. This precursor liquid preferably serves as a reagent in the coating process and is housed in a reactor. Once the precursor liquid is placed in the reactor, the substrate is immersed in the precursor liquid. While the substrate is immersed in the precursor liquid, which may or may not contain solid particles, the liquid is fluidized by one or more possible methods: passing a gas through the liquid; recirculating the liquid; and stirring the liquid. In the preferred embodiment, inductive heating of the substrate is performed by an induction coil. The induction coil will be driven by a generator to emit a high frequency alternating current electromagnetic field such that only the substrate is directly heated. Heating the substrate in a fluidized bed will cause chemical vapor deposition or chemical vapor infiltration to occur and the desired chemical compound, or element, to be deposited on the substrate. The compound that coats the substrate may be either the vaporized precursor liquid, a gas injected into the reactor, or some combination of the two.
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