发明授权
- 专利标题: Method of determining dielectric time-to-breakdown
- 专利标题(中): 确定介电时间分解的方法
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申请号: US09226676申请日: 1999-01-07
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公开(公告)号: US06188234B1公开(公告)日: 2001-02-13
- 发明人: Wagdi W. Abadeer , Jonathan M. McKenna
- 申请人: Wagdi W. Abadeer , Jonathan M. McKenna
- 主分类号: G01R3126
- IPC分类号: G01R3126
摘要:
A method of determining time-to-breakdown of a gate dielectric in an NFET or a PFET transistor. For an NFET transistor, the method includes providing an N+ injector ring in the p-substrate and forward biasing the N+ injector ring with respect to the p-substrate. A first positive reference voltage level is applied to the source and the drain regions. A second positive reference voltage level is applied to the gate dielectric. The first and second positive reference voltage levels are maintained on the transistor until breakdown of the gate dielectric occurs. Another embodiment of the method may be used in a PFET transistor.