发明授权
- 专利标题: Method of manufacture of composite self-aligned extraction grid and in-plane focusing ring
- 专利标题(中): 复合自对准提取网格和面内聚焦环及其制造方法
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申请号: US09109955申请日: 1998-07-02
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公开(公告)号: US06190223B1公开(公告)日: 2001-02-20
- 发明人: Kevin W. Tjaden , Terry N. Williams
- 申请人: Kevin W. Tjaden , Terry N. Williams
- 主分类号: H01J902
- IPC分类号: H01J902
摘要:
A field emission display having a base plate which has a focus ring structure substantially planar with the extraction grid. The field emission display base plate is fabricated on a substrate having a cathode including an emitter tip formed thereon by depositing a first insulating layer, a first conductive layer over the first insulating layer, etching the first conductive layer, depositing a second insulating layer over the etched first conductive layer, and depositing a second conductive or focus ring layer over the second insulating layer. A second selective etching may be formed to further define the gate and focus ring structures.
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