发明授权
US06190223B1 Method of manufacture of composite self-aligned extraction grid and in-plane focusing ring 失效
复合自对准提取网格和面内聚焦环及其制造方法

  • 专利标题: Method of manufacture of composite self-aligned extraction grid and in-plane focusing ring
  • 专利标题(中): 复合自对准提取网格和面内聚焦环及其制造方法
  • 申请号: US09109955
    申请日: 1998-07-02
  • 公开(公告)号: US06190223B1
    公开(公告)日: 2001-02-20
  • 发明人: Kevin W. TjadenTerry N. Williams
  • 申请人: Kevin W. TjadenTerry N. Williams
  • 主分类号: H01J902
  • IPC分类号: H01J902
Method of manufacture of composite self-aligned extraction grid and in-plane focusing ring
摘要:
A field emission display having a base plate which has a focus ring structure substantially planar with the extraction grid. The field emission display base plate is fabricated on a substrate having a cathode including an emitter tip formed thereon by depositing a first insulating layer, a first conductive layer over the first insulating layer, etching the first conductive layer, depositing a second insulating layer over the etched first conductive layer, and depositing a second conductive or focus ring layer over the second insulating layer. A second selective etching may be formed to further define the gate and focus ring structures.
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