发明授权
US06190752B1 Thin films having rock-salt-like structure deposited on amorphous surfaces
有权
具有岩盐结构的薄膜沉积在无定形表面上
- 专利标题: Thin films having rock-salt-like structure deposited on amorphous surfaces
- 专利标题(中): 具有岩盐结构的薄膜沉积在无定形表面上
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申请号: US09191449申请日: 1998-11-12
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公开(公告)号: US06190752B1公开(公告)日: 2001-02-20
- 发明人: Khiem B. Do , Pin-Chin Connie Wang , Robert H. Hammond , Theodore H. Geballe
- 申请人: Khiem B. Do , Pin-Chin Connie Wang , Robert H. Hammond , Theodore H. Geballe
- 主分类号: B32B310
- IPC分类号: B32B310
摘要:
A thin film of material having a rock-salt-like structure is deposited on a smooth amorphous substrate surface by ion beam assisted deposition.