发明授权
US06191489B1 Micromechanical layer stack arrangement particularly for flip chip or similar connections
有权
微机械层堆叠布置,特别适用于倒装芯片或类似连接
- 专利标题: Micromechanical layer stack arrangement particularly for flip chip or similar connections
- 专利标题(中): 微机械层堆叠布置,特别适用于倒装芯片或类似连接
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申请号: US09506634申请日: 2000-02-18
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公开(公告)号: US06191489B1公开(公告)日: 2001-02-20
- 发明人: Günter Igel , Hans-Jürgen Gahle , Mirko Lehmann
- 申请人: Günter Igel , Hans-Jürgen Gahle , Mirko Lehmann
- 优先权: DE19907168 19990219
- 主分类号: H01L2348
- IPC分类号: H01L2348
摘要:
A process is provided for manufacturing a layer arrangement (1) having a bump for a flip chip or similar connection. The layer arrangement has a plurality of layers (2, 3, 4, 5, 6, 7, 11) made of solid material and stacked into a layer stack (8). A recess (10) that extends over several layers (2, 3, 4, 5, 6, 7, 11) is made in the layer stack (8) transverse to the coating planes of the layers (2, 3, 4, 5, 6, 7, 11). A bump material (14) is placed in the recess (10). A profiling is created on the lateral boundary wall of the recess (10) by removal of layer material of different layers (2, 3, 4, 5, 6, 7, 11) of the layer stack (8). The profiling, starting from the surface (9) of the layer stack (8) and progressing in layers to the inside of the recess (10), has at least two indentations (12) and at least one projection (13) located between them. After the production of the profiling, a bump material (14) is brought into the recess (10) in such a way that it grasps behind the indentations (12).
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