发明授权
- 专利标题： Beam alignment correction element assembly
- 专利标题（中）： 光束对准校正元件组件
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申请号： US09260566申请日： 1999-02-02
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公开(公告)号： US06191897B1公开(公告)日： 2001-02-20
- 发明人: Laurence S. Blake , David B. Larsen , Norman Rolfe , Henry A. Kelley , Frank Scholten
- 申请人： Laurence S. Blake , David B. Larsen , Norman Rolfe , Henry A. Kelley , Frank Scholten
- 主分类号： G02B702
- IPC分类号： G02B702
摘要：
A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target includes a correction element housing, and first and second piezo elements. The correction element is fixedly mounted in the housing and moveable therewith. The piezo elements are supported by a member having a first portion and a second portion. The first piezo element is mounted to the first portion of the member and to said housing, and moves the housing in a first direction. The second piezo element is mounted to the second portion of the member and to a base, and moves the housing in a second direction substantially perpendicular to the first direction.