发明授权
- 专利标题： Coated object and process for producing the same
- 专利标题（中）： 涂层物体及其制造方法
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申请号： US09297051申请日： 1999-04-27
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公开(公告)号： US06194650B1公开(公告)日： 2001-02-27
- 发明人: Hiroaki Wakayama , Yoshiaki Fukushima , Narihito Tatsuda , Yoshitsugu Kojima , Osami Kamigaito , Yasutomo Goto , Shinji Inagaki , Kenichirou Suzuki , Megumi Sasaki , Hiroaki Hayashi , Kazuo Higuchi , Norihiko Setoyama
- 申请人： Hiroaki Wakayama , Yoshiaki Fukushima , Narihito Tatsuda , Yoshitsugu Kojima , Osami Kamigaito , Yasutomo Goto , Shinji Inagaki , Kenichirou Suzuki , Megumi Sasaki , Hiroaki Hayashi , Kazuo Higuchi , Norihiko Setoyama
- 优先权： JP9-247910 19970827; JP9-367266 19971224; JP10-143143 19980525; JP10-189220 19980703; JP10-189221 19980703; JP10-189222 19980703; JP10-189223 19980703; JP10-189224 19980703; JP10-189225 19980703
- 主分类号： H01L3100
- IPC分类号： H01L3100
摘要：
A coated material comprising a substrate which has micropores and a reaction product coated thereon along the surface configuration of the substrate and an inner wall of the micropores thereof. The coated material is preferably produced by performing a supercritical coating step wherein a reaction precursor is dissolved in a supercritical fluid to form a precursor fluid and then the precursor fluid is brought into contact with a substrate in the presence with a reaction initiator to allow a reaction between the reaction precursor and the reaction initiator, thereby coating a reaction product onto the substrate.
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