发明授权
- 专利标题: CD uniformity by active control of developer temperature
- 专利标题(中): 通过主动控制显影剂温度的CD均匀性
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申请号: US09410955申请日: 1999-10-05
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公开(公告)号: US06196734B1公开(公告)日: 2001-03-06
- 发明人: Michael K. Templeton , Bharath Rangarajan
- 申请人: Michael K. Templeton , Bharath Rangarajan
- 主分类号: G03D500
- IPC分类号: G03D500
摘要:
A system for regulating temperature of a developer is provided. The system includes a plurality of optical fibers, each optical fiber directing radiation to respective portions of the developer. Radiation reflected from the respective portions are collected by a measuring system which processes the collected radiation. The reflected radiation are indicative of the temperature of the respective portions of the developer. The measuring system provides developer temperature related data to a processor which determines the temperature of the respective portions of the developer. The system also includes a plurality of heating devices; each heating device corresponds to a respective portion of the developer and provides for the heating thereof. The processor selectively controls the heating devices so as to regulate temperature of the respective portions of the developer.
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