发明授权
- 专利标题: Actuator
- 专利标题(中): 执行器
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申请号: US09431126申请日: 1999-11-01
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公开(公告)号: US06201340B1公开(公告)日: 2001-03-13
- 发明人: Shinya Matsuda , Takashi Matsuo
- 申请人: Shinya Matsuda , Takashi Matsuo
- 优先权: JP10-312419 19981102
- 主分类号: H01L4108
- IPC分类号: H01L4108
摘要:
In a truss type actuator having two piezoelectric devices provided for crossing at right angle and driven by two alternating driving signals having a predetermined phase difference between them for driving a chip member along a predetermined elliptic trail (including a circular trail). The piezoelectric devices are contacted by protrusions having a high rigidity and formed on contacting faces of the chip member and a base member for holding the piezoelectric devices, and fixed by adhesive having a low rigidity and filled around the protrusions. Thereby, one of the piezoelectric device hardly receives a reaction force from another piezoelectric device due to the displacement thereof.