发明授权
US06204092B1 Apparatus and method for transferring semiconductor die to a carrier
失效
将半导体管芯转移到载体上的装置和方法
- 专利标题: Apparatus and method for transferring semiconductor die to a carrier
- 专利标题(中): 将半导体管芯转移到载体上的装置和方法
-
申请号: US09290421申请日: 1999-04-13
-
公开(公告)号: US06204092B1公开(公告)日: 2001-03-20
- 发明人: Joseph M. Freund , George J. Przybylek , Dennis M. Romero
- 申请人: Joseph M. Freund , George J. Przybylek , Dennis M. Romero
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
An apparatus and method for transferring a semiconductor die from an adhesive film to an output carrier is disclosed. The adhesive film and associated hoop assembly on which the die are secured are inverted so that die face downward, p-side down, from the film. And an output pack is positioned beneath the die. An ejector pin exerts a force on a side of the adhesive film opposite the side on which the semiconductor die is secured to release the die. A vacuum is provided through a port in the output pack, pulling the released die into the output pack. The transfer occurs in a single step and orients the die p-side down in the output pack, thus eliminating the control arm/vacuum collet assembly and associated handling steps of conventional transfer mechanisms.
信息查询