发明授权
- 专利标题: Method for fabricating a micromachined chip scale package
- 专利标题(中): 微加工芯片级封装的制造方法
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申请号: US08811711申请日: 1997-03-05
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公开(公告)号: US06207548B1公开(公告)日: 2001-03-27
- 发明人: Salman Akram , David R. Hembree , Warren M. Farnworth
- 申请人: Salman Akram , David R. Hembree , Warren M. Farnworth
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
A chip scale package comprised of a semiconductor die having a silicon blank laminated to its active surface. The bond pads of the die are accessed through apertures micromachined through the blank. The package may be employed with wire bonds, or solder or other conductive bumps may be placed in the blank apertures for flip-chip applications. Further, the package may be employed to reroute external connections of the die to other locations, such as a centralized ball grid array, or in an edge-connect arrangement for direct or discrete die connect (DDC) to a carrier. It is preferred that the chip scale package be formed at the wafer level, as one of a multitude of packages so formed with a wafer-level blank, and that the entire wafer be burned-in and tested to identify the known good die (KGD) before the wafer laminate is separated into individual packages.
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