发明授权
- 专利标题: Anti-notch thinning heater
- 专利标题(中): 防间距变薄加热器
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申请号: US09203419申请日: 1998-12-02
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公开(公告)号: US06210483B1公开(公告)日: 2001-04-03
- 发明人: Ken Tsai , Steve Ghanayem , Joseph Yudovsky , Ken Lai
- 申请人: Ken Tsai , Steve Ghanayem , Joseph Yudovsky , Ken Lai
- 主分类号: C23C1600
- IPC分类号: C23C1600
摘要:
The invention provides an apparatus for excluding unwanted deposition at the edge of a substrate which prevents excess purge gas from flowing over the surface of the substrate at the region adjacent a notch on a substrate. Another aspect of the invention provides a wider purge gas channel that prevents excess purge gas from flowing over the surface of the substrate. Still another aspect of the present invention provides a purge gas guide that includes a notch therein to prevent excess purge gas from adversely affecting deposition at the vicinity of the substrate notch.