发明授权
US06211555B1 Semiconductor device with a pair of transistors having dual work function gate electrodes
有权
具有双工作功能栅电极的一对晶体管的半导体器件
- 专利标题: Semiconductor device with a pair of transistors having dual work function gate electrodes
- 专利标题(中): 具有双工作功能栅电极的一对晶体管的半导体器件
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申请号: US09162407申请日: 1998-09-29
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公开(公告)号: US06211555B1公开(公告)日: 2001-04-03
- 发明人: Todd A. Randazzo , Jan Kolnik
- 申请人: Todd A. Randazzo , Jan Kolnik
- 主分类号: H01L2976
- IPC分类号: H01L2976
摘要:
Techniques are described for fabricating a pair of &bgr;-identical transistors, in other words, a pair of transistors whose dimensions and electrical characteristics, other than their respective gate electrode work functions, are substantially similar. In particular, the lengths of respective channel regions for the transistors are substantially the same, and portions of each gate electrode extending above a channel region include only dopants of a single conductivity type. The techniques can be incorporated into a standard CMOS process.
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