发明授权
US06215137B1 Micromechanical sensor for scanning thermal imaging microscope and method of making the same
失效
用于扫描热成像显微镜的微机械传感器及其制作方法
- 专利标题： Micromechanical sensor for scanning thermal imaging microscope and method of making the same
- 专利标题（中）： 用于扫描热成像显微镜的微机械传感器及其制作方法
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申请号： US09132762申请日： 1998-08-12
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公开(公告)号： US06215137B1公开(公告)日： 2001-04-10
- 发明人: Yoshihiko Suzuki , Shinya Hara
- 申请人： Yoshihiko Suzuki , Shinya Hara
- 优先权： JP9-267725 19970912
- 主分类号： H01L2720
- IPC分类号： H01L2720
摘要：
A probe is provided with a thermocouple made of a joint between a first metal material and a second metal material. The first metal material is formed on the surface of a flexible plate facing a substrate, continuously from the thermocouple portion. The surface of the flexible plate facing the substrate is formed with a first wiring conductive film, which is electrically connected to the first metal material and extends over the proximal end side area of the flexible plate.
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