发明授权
- 专利标题: Group III nitride field emitters
- 专利标题(中): III族氮化物场发射体
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申请号: US09105488申请日: 1998-06-26
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公开(公告)号: US06218771B1公开(公告)日: 2001-04-17
- 发明人: Igor Berishev , Abdelhak Bensaoula
- 申请人: Igor Berishev , Abdelhak Bensaoula
- 主分类号: H01J1906
- IPC分类号: H01J1906
摘要:
Field emitter as a source of electrons and method for making are provided. The emitter is formed by growth of a nitride compound of a group III element or alloys of group III elements on a substrate having a lattice mismatch with the thin film. The lattice mismatch causes columnar growth in the film. The micro columns have tips, thus forming an array of crystalline microtips of the low work function nitride material. The nitride compound is doped during growth. Gallium nitride grown on (111) silicon and doped with silicon produces a surface having low threshold electric field for emission and high current per unit area.
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