发明授权
- 专利标题: Turbomolecular pump
- 专利标题(中): 涡轮分子泵
-
申请号: US09133331申请日: 1998-08-13
-
公开(公告)号: US06220831B1公开(公告)日: 2001-04-24
- 发明人: Atsushi Shiokawa , Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa
- 申请人: Atsushi Shiokawa , Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa
- 优先权: JP9-235438 19970815
- 主分类号: F04B1704
- IPC分类号: F04B1704
摘要:
A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.
信息查询