发明授权
US06221495B1 Thin transparent conducting films of cadmium stannate 失效
锑酸锡薄透明导电薄膜

  • 专利标题: Thin transparent conducting films of cadmium stannate
  • 专利标题(中): 锑酸锡薄透明导电薄膜
  • 申请号: US08740347
    申请日: 1996-11-07
  • 公开(公告)号: US06221495B1
    公开(公告)日: 2001-04-24
  • 发明人: Xuanzhi WuTimothy J. Coutts
  • 申请人: Xuanzhi WuTimothy J. Coutts
  • 主分类号: B32B1500
  • IPC分类号: B32B1500
Thin transparent conducting films of cadmium stannate
摘要:
A process for preparing thin Cd2SnO4 films. The process comprises the steps of RF sputter coating a Cd2SnO4 layer onto a first substrate; coating a second substrate with a CdS layer; contacting the Cd2SnO4 layer with the CdS layer in a water- and oxygen-free environment and heating the first and second substrates and the Cd2SnO4 and CdS layers to a temperature sufficient to induce crystallization of the Cd2SnO4 layer into a uniform single-phase spinel-type structure, for a time sufficient to allow full crystallization of the Cd2SnO4 layer at that temperature; cooling the first and second substrates to room temperature; and separating the first and second substrates and layers from each other. The process can be conducted at temperatures less than 600° C., allowing the use of inexpensive soda lime glass substrates.
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