发明授权
- 专利标题: Thin transparent conducting films of cadmium stannate
- 专利标题(中): 锑酸锡薄透明导电薄膜
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申请号: US08740347申请日: 1996-11-07
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公开(公告)号: US06221495B1公开(公告)日: 2001-04-24
- 发明人: Xuanzhi Wu , Timothy J. Coutts
- 申请人: Xuanzhi Wu , Timothy J. Coutts
- 主分类号: B32B1500
- IPC分类号: B32B1500
摘要:
A process for preparing thin Cd2SnO4 films. The process comprises the steps of RF sputter coating a Cd2SnO4 layer onto a first substrate; coating a second substrate with a CdS layer; contacting the Cd2SnO4 layer with the CdS layer in a water- and oxygen-free environment and heating the first and second substrates and the Cd2SnO4 and CdS layers to a temperature sufficient to induce crystallization of the Cd2SnO4 layer into a uniform single-phase spinel-type structure, for a time sufficient to allow full crystallization of the Cd2SnO4 layer at that temperature; cooling the first and second substrates to room temperature; and separating the first and second substrates and layers from each other. The process can be conducted at temperatures less than 600° C., allowing the use of inexpensive soda lime glass substrates.
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