发明授权
US06222302B1 Piezoelectric actuator, infrared sensor and piezoelectric light deflector
失效
压电执行器，红外传感器和压电光偏转器
- 专利标题： Piezoelectric actuator, infrared sensor and piezoelectric light deflector
- 专利标题（中）： 压电执行器，红外传感器和压电光偏转器
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申请号： US09163348申请日： 1998-09-30
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公开(公告)号： US06222302B1公开(公告)日： 2001-04-24
- 发明人: Katsumi Imada , Katsunori Moritoki , Takeshi Masutani , Kouji Nomura , Kouji Kawakita
- 申请人： Katsumi Imada , Katsunori Moritoki , Takeshi Masutani , Kouji Nomura , Kouji Kawakita
- 优先权： JP9-267087 19970930; JP10-255049 19980909
- 主分类号： H01L4108
- IPC分类号： H01L4108
摘要：
The drive section made by bonding the piezoelectric material on part of the elastic shim and the displacement amplifying section which amplifies the amplitude of vibration vibrated in the drive section are provided in the same plane. The device is driven at drive frequencies in a region between the resonance frequency of the drive section and the resonance frequency of the displacement amplifying section.
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