发明授权
- 专利标题: Piezoelectric actuator having an array of drive columns
- 专利标题(中): 具有驱动柱阵列的压电致动器
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申请号: US09247599申请日: 1999-02-10
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公开(公告)号: US06222303B1公开(公告)日: 2001-04-24
- 发明人: Hirofumi Nakamura , Torahiko Kanda
- 申请人: Hirofumi Nakamura , Torahiko Kanda
- 优先权: JP10-029997 19980212
- 主分类号: H01L4104
- IPC分类号: H01L4104
摘要:
A piezoelectric actuator has a base, and an array of drive columns separated by grooves and each having a top surface for outputting a displacement force. Each of the drive columns is formed in a unitary body with an underlying portion of the base by a first block of a plurality of green sheets made of a piezoelectric material and stacked together. The base has additionally a second block of green sheets stacked between adjacent two of the first block at the portion of the base underlying the groove.
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