发明授权
US06222303B1 Piezoelectric actuator having an array of drive columns 有权
具有驱动柱阵列的压电致动器

  • 专利标题: Piezoelectric actuator having an array of drive columns
  • 专利标题(中): 具有驱动柱阵列的压电致动器
  • 申请号: US09247599
    申请日: 1999-02-10
  • 公开(公告)号: US06222303B1
    公开(公告)日: 2001-04-24
  • 发明人: Hirofumi NakamuraTorahiko Kanda
  • 申请人: Hirofumi NakamuraTorahiko Kanda
  • 优先权: JP10-029997 19980212
  • 主分类号: H01L4104
  • IPC分类号: H01L4104
Piezoelectric actuator having an array of drive columns
摘要:
A piezoelectric actuator has a base, and an array of drive columns separated by grooves and each having a top surface for outputting a displacement force. Each of the drive columns is formed in a unitary body with an underlying portion of the base by a first block of a plurality of green sheets made of a piezoelectric material and stacked together. The base has additionally a second block of green sheets stacked between adjacent two of the first block at the portion of the base underlying the groove.
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