发明授权
US06225164B1 Semiconductor memory and method for fabricating the same 有权
半导体存储器及其制造方法

  • 专利标题: Semiconductor memory and method for fabricating the same
  • 专利标题(中): 半导体存储器及其制造方法
  • 申请号: US09642592
    申请日: 2000-08-22
  • 公开(公告)号: US06225164B1
    公开(公告)日: 2001-05-01
  • 发明人: Min Gyu Lim
  • 申请人: Min Gyu Lim
  • 优先权: KR99-48446 19991103
  • 主分类号: H01L218247
  • IPC分类号: H01L218247
Semiconductor memory and method for fabricating the same
摘要:
Semiconductor memory and a method for fabricating the same, in which sides of a floating gate is formed to have a streamlined profile, for improving a device performance, the semiconductor memory including a semiconductor substrate, a plurality of field oxide films formed at fixed intervals in one direction for isolating an active region between adjacent field oxide films, a plurality of control gates formed at fixed intervals in a second direction perpendicular to the field oxide films, a plurality of floating gates respectively formed under the control gates spaced a distance from each other each having edge portions in the second direction with moderate slopes, an interlayer insulating layer formed at interfaces between the floating gate and the control gate, and source/drain formed in surfaces of a semiconductor substrate on both sides of the control gate.
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