发明授权
US06225646B1 Integrated circuit incorporating a memory cell and a transistor elevated above an insulating base 有权
集成电路结合存储单元和升高在绝缘基底上方的晶体管

  • 专利标题: Integrated circuit incorporating a memory cell and a transistor elevated above an insulating base
  • 专利标题(中): 集成电路结合存储单元和升高在绝缘基底上方的晶体管
  • 申请号: US09483557
    申请日: 2000-01-14
  • 公开(公告)号: US06225646B1
    公开(公告)日: 2001-05-01
  • 发明人: Mark I. GardnerH. Jim Fulford
  • 申请人: Mark I. GardnerH. Jim Fulford
  • 主分类号: H01L3300
  • IPC分类号: H01L3300
Integrated circuit incorporating a memory cell and a transistor elevated above an insulating base
摘要:
An integrated circuit is presented. The integrated circuit may include a memory cell formed above an insulating base. The insulating base may either be arranged above a substrate or serve as a substrate itself. A transistor may be arranged above the memory cell. The transistor is preferably dielectrically isolated from the memory cell. In a preferred embodiment, a segmented substrate is arranged between the memory cell and transistor. The segmented substrate preferably includes a first conductive substrate layer arranged above and dielectrically spaced from the memory cell. A second conductive substrate layer may be formed above the first conductive substrate layer. The transistor may be arranged upon and within the second conductive substrate layer. Preferably, the segmented substrate further includes an intersubstrate dielectric layer interposed between the second conductive substrate layer and the first conductive substrate layer. The intersubstrate dielectric layer preferably serves to insulate the first conductive substrate layer from the second conductive substrate layer. An integrated circuit so configured may be fabricated with greater device density at reduced cost.
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