发明授权
- 专利标题: Methods of forming capacitors and DRAM arrays
- 专利标题(中): 形成电容器和DRAM阵列的方法
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申请号: US09291423申请日: 1999-04-13
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公开(公告)号: US06228710B1公开(公告)日: 2001-05-08
- 发明人: Kunal R. Parekh , John K. Zahurak
- 申请人: Kunal R. Parekh , John K. Zahurak
- 主分类号: H01L218242
- IPC分类号: H01L218242
摘要:
The invention encompasses methods of forming DRAM constructions, methods of forming capacitor constructions, DRAM constructions, and capacitor constructions. The invention includes a method in which a) a first layer is formed over a node location; b) a semiconductive material masking layer is formed over the first layer; c) an opening is formed through the semiconductive material masking layer and the first layer to the node location; d) an upwardly open capacitor storage node layer is formed within the opening; e) a storage node is formed from the masking layer and the storage node layer; and f) a capacitor dielectric layer and a capacitor plate are formed over the storage node. The invention also includes a capacitor structure comprising: a) an insulative layer over a substrate; b) a polysilicon layer over the insulative layer; c) an opening extending through the polysilicon layer and the insulative layer to a node, the opening comprising an upper portion and a lower portion, the upper portion comprising a first minimum cross-sectional dimension and the lower portion comprising a second minimum cross-sectional dimension which is narrower than the first minimum cross-sectional dimension, the opening further comprising a step at an interface of the upper and lower portions; d) a spacer over the step; e) a storage node layer over the spacer, polysilicon layer and the node; and f) a dielectric layer and a cell plate layer capacitively coupled to the storage node layer.
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