发明授权
US06238971B1 Capacitor structures, DRAM cell structures, and integrated circuitry, and methods of forming capacitor structures, integrated circuitry and DRAM cell structures
失效
电容器结构,DRAM单元结构和集成电路,以及形成电容器结构,集成电路和DRAM单元结构的方法
- 专利标题: Capacitor structures, DRAM cell structures, and integrated circuitry, and methods of forming capacitor structures, integrated circuitry and DRAM cell structures
- 专利标题(中): 电容器结构,DRAM单元结构和集成电路,以及形成电容器结构,集成电路和DRAM单元结构的方法
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申请号: US08798242申请日: 1997-02-11
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公开(公告)号: US06238971B1公开(公告)日: 2001-05-29
- 发明人: Kunal R. Parekh , John K. Zahurak
- 申请人: Kunal R. Parekh , John K. Zahurak
- 主分类号: H01L218242
- IPC分类号: H01L218242
摘要:
The invention encompasses DRAM constructions, capacitor constructions, integrated circuitry, and methods of forming DRAM constructions, integrated circuitry and capacitor constructions. The invention encompasses a method of forming a capacitor wherein: a) a first layer is formed; b) a semiconductive material masking layer is formed over the first layer; c) an opening is etched through the masking layer and first layer to a node; d) a storage node layer is formed within the opening and in electrical connection with the masking layer; e) a capacitor storage node is formed from the masking layer and the storage node layer; and f) a capacitor dielectric layer and outer capacitor plate are formed operatively proximate the capacitor storage node. The invention also includes a DRAM cell comprising: a) a bitline node and a capacitor node electrically connected together through a transistor gate; b) a capacitor electrically connected to the capacitor node, the capacitor comprising; i) a storage node, the storage node in lateral cross-section comprising an outer surface extending over a top of the storage node, along a pair of opposing lateral surfaces of the storage node, and within laterally opposing cavities beneath the storage node; ii) a dielectric layer against the storage node outer surface and extending within the opposing cavities beneath the storage node; and iii) a cell plate layer against the dielectric layer and extending within the opposing cavities beneath the storage node; and c) a bitline electrically connected to the bitline node.
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