发明授权
- 专利标题: Plasma processing apparatus
- 专利标题(中): 等离子体处理装置
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申请号: US09462147申请日: 2000-03-08
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公开(公告)号: US06239404B1公开(公告)日: 2001-05-29
- 发明人: Leslie Michael Lea , Edward Guibarra
- 申请人: Leslie Michael Lea , Edward Guibarra
- 优先权: GB9714142 19970705
- 主分类号: B23K1000
- IPC分类号: B23K1000
摘要:
Plasma processing apparatus frequently incorporates an antenna fed from a power supply and in this invention a power supply feeds a conventional matching circuit (10), which in turn is connected to the primary (11) of a transformer (12). The antenna (15) is coupled across the secondary winding (13) of the transformer (12) and that winding is tapped to ground at (16). This creates a virtual earth (17) near the mid point of the antenna (15) significantly reducing the variation, along the length of the antenna, in the power supplied to the plasma.
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