发明授权
- 专利标题: Substrate treatment device
- 专利标题(中): 底物处理装置
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申请号: US09308105申请日: 1999-05-04
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公开(公告)号: US06244282B1公开(公告)日: 2001-06-12
- 发明人: Martin Weber
- 申请人: Martin Weber
- 优先权: DE19645425 19961104
- 主分类号: B08B304
- IPC分类号: B08B304
摘要:
A device for the treatment of substrates has a fluid container filled with a treatment fluid and at least one substrate receiving device. A lifting device is provided for lifting and lowering the at least one substrate receiving device out of and into the treatment fluid. The lifting device is arranged laterally at the container and has parts that are positioned above the container and the treatment fluid. A vapor suction device with a suction channel is provided for exhaustion of vapors in an area in which parts of the at least one lifting device are located above the treatment fluid. In the area above the treatment fluid, a plate is provided having an opening to which the suction channel is connected.
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