发明授权
- 专利标题： Apparatus for reducing reflections off the surface of a semiconductor surface
- 专利标题（中）： 用于减少离开半导体表面的反射的装置
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申请号： US08778019申请日： 1996-12-31
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公开(公告)号： US06246098B1公开(公告)日： 2001-06-12
- 发明人: Mario J. Paniccia
- 申请人： Mario J. Paniccia
- 主分类号： H01L310232
- IPC分类号： H01L310232
摘要：
An apparatus for reducing the reflection of photons off the surface of a semiconductor device under test. In one embodiment, the present invention includes a semiconductor device comprising an integrated circuit formed on the top side of a semiconductor substrate. An anti-reflective coating is disposed over the back side of the semiconductor substrate for reducing the reflection of photons at the silicon/air interface.
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