发明授权
US06248144B1 Process for producing polishing composition 有权
抛光组合物的制造方法

  • 专利标题: Process for producing polishing composition
  • 专利标题(中): 抛光组合物的制造方法
  • 申请号: US09616974
    申请日: 2000-07-14
  • 公开(公告)号: US06248144B1
    公开(公告)日: 2001-06-19
  • 发明人: Kazusei TamaiKatsuyoshi Ina
  • 申请人: Kazusei TamaiKatsuyoshi Ina
  • 优先权: JP11-202181 19990715
  • 主分类号: C01B33141
  • IPC分类号: C01B33141
Process for producing polishing composition
摘要:
A process for producing a polishing composition, which comprises preliminarily adjusting water to pH 2-4, adding from 40 to 60 wt % of fumed silica to the water under high shearing force, adding water to lower the viscosity to 2-10000 cps, stirring the mixture under low shearing force for at least 5 minutes, adding water to lower the fumed silica concentration to 10-38 wt %, and adding a basic substance under vigorous stirring to raise the pH to 9-12.
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