发明授权
- 专利标题: Process for producing polishing composition
- 专利标题(中): 抛光组合物的制造方法
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申请号: US09616974申请日: 2000-07-14
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公开(公告)号: US06248144B1公开(公告)日: 2001-06-19
- 发明人: Kazusei Tamai , Katsuyoshi Ina
- 申请人: Kazusei Tamai , Katsuyoshi Ina
- 优先权: JP11-202181 19990715
- 主分类号: C01B33141
- IPC分类号: C01B33141
摘要:
A process for producing a polishing composition, which comprises preliminarily adjusting water to pH 2-4, adding from 40 to 60 wt % of fumed silica to the water under high shearing force, adding water to lower the viscosity to 2-10000 cps, stirring the mixture under low shearing force for at least 5 minutes, adding water to lower the fumed silica concentration to 10-38 wt %, and adding a basic substance under vigorous stirring to raise the pH to 9-12.
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