发明授权
- 专利标题： Surface micro-machined acoustic transducers
- 专利标题（中）： 表面微加工声学传感器
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申请号： US09442984申请日： 1999-11-18
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公开(公告)号： US06249075B1公开(公告)日： 2001-06-19
- 发明人: David John Bishop , Robert Albert Boie , Flavio Pardo
- 申请人： David John Bishop , Robert Albert Boie , Flavio Pardo
- 主分类号： G01L116
- IPC分类号： G01L116
摘要：
A micro-machined transducer having a structure in which an acoustic enclosure is formed on a substrate above the plane of the substrate surface is disclosed. Forming the acoustic enclosure on the substrate above the plane of the substrate surface, rather than an acoustic cavity in a surface of the substrate, provides an acoustic cavity whose size is not limited by the thickness of the substrate.
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