发明授权
- 专利标题: Beam-type accelerometer
- 专利标题(中): 梁式加速度计
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申请号: US09423382申请日: 1999-11-05
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公开(公告)号: US06252335B1公开(公告)日: 2001-06-26
- 发明人: Kenth Nilsson , Eva Nilsson
- 申请人: Kenth Nilsson , Eva Nilsson
- 优先权: SE9701721 19970507
- 主分类号: H01L4108
- IPC分类号: H01L4108
摘要:
An accelerometer has a cantilevered beam supported at one end and having an opposite free end, with an inertial, sensing mass mounted at the free end of the beam. The beam is formed of a piezoelectric layer and a supporting layer. The ratio of the thickness of the piezoelectric layer relative to the thickness of the supporting layer is in a range between 2 and 4. The ratio of the modulus of elasticity of the material forming the supporting layer relative to the modulus of elasticity of the material forming the piezoelectric layer is in a range between 8 and 12.
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