发明授权
US06252335B1 Beam-type accelerometer 失效
梁式加速度计

  • 专利标题: Beam-type accelerometer
  • 专利标题(中): 梁式加速度计
  • 申请号: US09423382
    申请日: 1999-11-05
  • 公开(公告)号: US06252335B1
    公开(公告)日: 2001-06-26
  • 发明人: Kenth NilssonEva Nilsson
  • 申请人: Kenth NilssonEva Nilsson
  • 优先权: SE9701721 19970507
  • 主分类号: H01L4108
  • IPC分类号: H01L4108
Beam-type accelerometer
摘要:
An accelerometer has a cantilevered beam supported at one end and having an opposite free end, with an inertial, sensing mass mounted at the free end of the beam. The beam is formed of a piezoelectric layer and a supporting layer. The ratio of the thickness of the piezoelectric layer relative to the thickness of the supporting layer is in a range between 2 and 4. The ratio of the modulus of elasticity of the material forming the supporting layer relative to the modulus of elasticity of the material forming the piezoelectric layer is in a range between 8 and 12.
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