发明授权
- 专利标题: Method for testing semiconductor dice and chip scale packages
- 专利标题(中): 半导体芯片和芯片级封装的测试方法
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申请号: US09098594申请日: 1998-06-17
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公开(公告)号: US06255833B1公开(公告)日: 2001-07-03
- 发明人: Salman Akram , Alan G. Wood , David R. Hembree , Warren M. Farnworth
- 申请人: Salman Akram , Alan G. Wood , David R. Hembree , Warren M. Farnworth
- 主分类号: G01R3102
- IPC分类号: G01R3102
摘要:
A method and carrier for testing semiconductor dice such as bare dice or chip scale packages are provided. The carrier includes a base for retaining a single die, an interconnect for establishing temporary electrical communication with the die, and a force applying mechanism for biasing the die and interconnect together. In an illustrative embodiment the base includes conductors arranged in a universal pattern adapted to electrically connect to different sized interconnects. Interconnects are thus interchangeable on a base for testing different types of dice using the same base. The conductors on the base can be formed on a planar active surface of the base or on a stepped active surface having different sized cavities for mounting different sized interconnects. In an alternate embodiment the carrier includes an interposer. In a first interposer embodiment, the interposer connects directly to external test circuitry and can be changed to accommodate different sized interconnects. In a second interposer embodiment, the interposer connects to conductors on the base and adapts the base for use with different sized interconnects.
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