发明授权
- 专利标题: Substrate cleaning apparatus and method
- 专利标题(中): 基板清洗装置及方法
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申请号: US09166593申请日: 1998-10-06
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公开(公告)号: US06260562B1公开(公告)日: 2001-07-17
- 发明人: Kenya Morinishi , Masami Ohtani , Joichi Nishimura , Akihiko Morita
- 申请人: Kenya Morinishi , Masami Ohtani , Joichi Nishimura , Akihiko Morita
- 优先权: JP9-286729 19971020; JP9-286730 19971020
- 主分类号: B08B302
- IPC分类号: B08B302
摘要:
A substrate cleaning apparatus includes a spin support for supporting and spinning a substrate, a nozzle for discharging a cleaning liquid with a given cleaning condition from a discharge opening, a moving mechanism for moving the nozzle at least between center and edge of the substrate, a cleaning condition adjuster for adjusting the cleaning condition, and a controller for controlling the cleaning condition adjuster to vary the cleaning condition according to a cleaning liquid supply position movable over the substrate surface.
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