发明授权
US06261945B1 Crackstop and oxygen barrier for low-K dielectric integrated circuits 有权
低K电介质集成电路的裂纹和氧气屏障

Crackstop and oxygen barrier for low-K dielectric integrated circuits
摘要:
A copper-interconnect, low-K dielectric integrated circuit has reduced corrosion of the interconnect when the crackstop next to the kerf is also used as the primacy barrier to oxygen diffusion through the dielectric, with corresponding elements of the crackstop being constructed simultaneously with the circuit interconnect elements; e.g. horizontal interconnect elements have a corresponding structure in the crackstop and vias between interconnect layers have corresponding structures in the crackstop.
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