发明授权
- 专利标题： Growth method of a polymer film
- 专利标题（中）： 聚合物膜的生长方法
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申请号： US09333875申请日： 1999-06-14
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公开(公告)号： US06261974B1公开(公告)日： 2001-07-17
- 发明人: Jun Kawahara , Yoshihiro Hayashi , Akinori Nakano , Mikio Shimizu , Tomohisa Nishikawa
- 申请人： Jun Kawahara , Yoshihiro Hayashi , Akinori Nakano , Mikio Shimizu , Tomohisa Nishikawa
- 优先权： JP10-170016 19980617
- 主分类号： H01L21469
- IPC分类号： H01L21469
摘要：
A DVS-BCB polymer film is grown by heating a divinyl siloxane bisbenzocyclobutene (DVS-BCB) monomer in a vaporization controller with continuously supplying; supplying a carrier gas and maintaining a partial pressure of the DVS-BCB monomer at a state lower than a saturated vapor pressure, thereby to vaporize the monomer; transporting the carrier gas containing the DVS-BCB monomer from the vaporization controller to an evacuated reaction chamber; and spraying the gas on the heated surface of a substrate in the reaction chamber.