发明授权
- 专利标题: Piezoelectric acceleration sensor and method of detecting acceleration and manufacturing method thereof
- 专利标题(中): 压电加速度传感器及其加速度检测方法
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申请号: US09289936申请日: 1999-04-13
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公开(公告)号: US06263734B1公开(公告)日: 2001-07-24
- 发明人: Satoru Fujii , Isaku Kanno , Takeshi Kamada , Ryoichi Takayama
- 申请人: Satoru Fujii , Isaku Kanno , Takeshi Kamada , Ryoichi Takayama
- 优先权: JP10-100777 19980413; JP11-064733 19990311
- 主分类号: G01P1509
- IPC分类号: G01P1509
摘要:
An acceleration sensor 201 comprises a longitudinal effect type detection unit 203 and a lateral effect type detection unit 204. The longitudinal effect type detection unit 203 comprises a longitudinal effect type piezoelectric element 211 comprising a piezoelectric body 211a of a thin film, an electrode 211b and an electrode 211c, which is formed on a deposition substrate 221 serving also as a weight. The lateral effect type detection unit 204 is constituted by providing a lateral effect type piezoelectric element 213 comprising a piezoelectric body 213a of a thin film, an electrode 213b and an electrode 213c, which is formed on the deposition substrate 221 and is cantilevered above a groovy recessed part 105a on a substrate 105. A detection circuit 116 detects an acceleration in a predetermined direction, based on an output of both the longitudinal effect type detection unit 203 and the lateral effect type detection unit 204. Consequently, it is possible to detect an acceleration in a predetermined direction and to make a wider dynamic range and a wider band.
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