发明授权
- 专利标题: High-efficiency polycrystalline silicon resistor system for use in a thermal inkjet printhead
- 专利标题(中): 用于热喷墨打印头的高效多晶硅电阻系统
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申请号: US09427512申请日: 1999-10-26
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公开(公告)号: US06267471B1公开(公告)日: 2001-07-31
- 发明人: Ravi Ramaswami , Victor Joseph , Min Cao
- 申请人: Ravi Ramaswami , Victor Joseph , Min Cao
- 主分类号: B41J205
- IPC分类号: B41J205
摘要:
A highly-efficient thermal inkjet printhead. The printhead includes at least one doped polycrystalline silicon resistor which communicates with an external signal source using a unique interconnection system. Specifically, a primary layer of electrically conductive material (optimally a metal silicide) is connected to the resistor. An additional layer of electrically conductive material is attached to and above the primary layer. The additional layer terminates at a position which is spaced outwardly and apart from the resistor to form a gap therebetween. However, the underlying primary layer electrically links the additional layer to the resistor. Alternatively, a dielectric layer is attached to and above the primary layer, with the additional layer being secured to the dielectric layer. At least one electrically conductive contact member is provided within the dielectric layer to link the primary and additional layers. These systems provide improved reliability, greater dimensional simplicity, and optimized electrical/thermal properties.
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