发明授权
- 专利标题: Micromachined pump apparatus
- 专利标题(中): 微加工泵装置
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申请号: US09445000申请日: 1999-11-23
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公开(公告)号: US06273687B1公开(公告)日: 2001-08-14
- 发明人: Wataru Nogimori , Yoshihiro Naruse , Kouichi Irisa , Shinji Ando
- 申请人: Wataru Nogimori , Yoshihiro Naruse , Kouichi Irisa , Shinji Ando
- 优先权: JP10-336012 19981126
- 主分类号: F04B1700
- IPC分类号: F04B1700
摘要:
A micromachined pump apparatus 1 includes a substrate 2 having upper and lower surfaces and a plurality of lengthwise arranged apertures 2A-2E, each of which has an upper surface opening and a lower surface opening. A plurality of diaphragms 6A-6E close the upper surface openings of the apertures 2A-2E, respectively. A guide plate 3 is fixedly mounted on the upper surface of the substrate 2 and defines a passage 3a through which an object fluid is moved by cooperating with the diaphragms on the upper surface of the substrate 2. A base plate 4 is fixedly mounted at its upper surface on the lower surface of the substrate 2, thereby enclosing an operating fluid in each of the apertures 2A-2E. An electrically operated heater device 5 is provided on the upper surface of the base plate 4 for heating the fluids in the apertures 2A-2E, respectively, in such a manner that whenever the fluids are heated the resultant expansion of the respective operating fluid expands the diaphragms, respectively, toward the passage. The expansions of the diaphragms 6A-6E are made in sequence, thereby forcing the object fluid to move through the passage 3a.