- 专利标题: Use of alkoxy N-hydroxyalkyl alkanamide as resist removing agent, composition for removing resist, method for preparing the same and resist removing method using the same
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申请号: US09348829申请日: 1999-07-08
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公开(公告)号: US06274537B1公开(公告)日: 2001-08-14
- 发明人: Dong-jin Park , Jin-ho Hwang , June-ing Gil , Je-eung Park , Sang-mun Chon
- 申请人: Dong-jin Park , Jin-ho Hwang , June-ing Gil , Je-eung Park , Sang-mun Chon
- 优先权: KR98-32354 19980805; KR98-32355 19980805; KR99-20973 19990607
- 主分类号: C03F742
- IPC分类号: C03F742
摘要:
A resist removing agent and a resist removing composition, having an excellent capability for removing a resist and polymer and which does not attack underlying layers, a method for preparing the same and a resist removing method using the same. The resist removing agent includes alkoxy N-hydroxyalkyl alkanamide. The resist removing composition includes alkoxy N-hydroxyalkyl alkanamide, and at least one compound selected from a group consisting of a polar material having a dipole moment of 3 or greater, an attack inhibitor and alkanolamine. A substrate having the resist thereon is brought into contact with the resist removing agent or resist removing composition to remove the resist.
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