发明授权
- 专利标题: Probe card treatment method
- 专利标题(中): 探针卡治疗方法
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申请号: US09418199申请日: 1999-10-13
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公开(公告)号: US06277218B1公开(公告)日: 2001-08-21
- 发明人: Chin-Fa Tai , Cindy Chen , Kelly Liao
- 申请人: Chin-Fa Tai , Cindy Chen , Kelly Liao
- 主分类号: C21D926
- IPC分类号: C21D926
摘要:
A probe card treatment method, which is applicable on a probe card comprising multiple probe needles, is described. A thermal treatment is conducted on the probe card by placing the probe card in a closed heating device, wherein the temperature of the thermal treatment is enough to restore the elasticity and the planarity of the probe needles without softening the probe card. The probe card and the probe needles thereon are then rapidly cooled by cool air such that the elasticity of the probe needles is retained and the lifetime of the probe needles is extended.
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