发明授权
- 专利标题： Method of manufacturing optical disc master plate
- 专利标题（中）： 制造光盘主板的方法
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申请号： US09231904申请日： 1999-01-14
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公开(公告)号： US06277545B1公开(公告)日： 2001-08-21
- 发明人: Tetsuya Iida , Takanobu Higuchi , Osamu Kasono
- 申请人： Tetsuya Iida , Takanobu Higuchi , Osamu Kasono
- 优先权： JP10-017802 19980114
- 主分类号： G11B7135
- IPC分类号： G11B7135
摘要：
A method of manufacturing an optical disc master plate, comprises the steps of: forming a photoresist layer having an electrically conductivity on a substrate; and irradiating the photoresist layer with a laser beam, using an optical system capable of holding a solid immersion lens on a flying head.
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