发明授权
- 专利标题: Epicyclic stage
- 专利标题(中): 周期阶段
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申请号: US09414612申请日: 1999-10-08
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公开(公告)号: US06279490B1公开(公告)日: 2001-08-28
- 发明人: Manuel G. Pastor
- 申请人: Manuel G. Pastor
- 主分类号: A47B5700
- IPC分类号: A47B5700
摘要:
A movable stage assembly suitable for use in a vacuum has three circular stages rotating independently of one another. The stage assembly includes a base and a large rotatable circular table mounted on the base. This large table has a second smaller circular table which is eccentrically mounted within the first large table and rotates independently. This second table also has a smaller third circular table eccentrically mounted on it and independently rotatable within the second table. All the rotatable tables utilize ferrofluidic seals to prevent air within the air bearings from leaking into the vacuum chamber and are driven by motors mounted beneath the tables.
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