发明授权
US06281544B1 Flash memory structure and method of manufacture 失效
闪存结构及制造方法

  • 专利标题: Flash memory structure and method of manufacture
  • 专利标题(中): 闪存结构及制造方法
  • 申请号: US09521984
    申请日: 2000-03-09
  • 公开(公告)号: US06281544B1
    公开(公告)日: 2001-08-28
  • 发明人: Gary Hong
  • 申请人: Gary Hong
  • 优先权: TW87112801 19980804
  • 主分类号: H01L2976
  • IPC分类号: H01L2976
Flash memory structure and method of manufacture
摘要:
A flash memory structure comprises a first polysilicon layer above a semiconductor substrate; a thin dielectric layer above the first polysilicon layer; and a second polysilicon layer across and above the dielectric layer and the substrate, wherein the second polysilicon layer has a linear shape when viewed from the top. The memory structure further comprises a drain region in the semiconductor substrate on one side of the second polysilicon layer; a trench isolation structure for insulating from neighboring devices; a buried metallic layer located inside a portion of the trench isolation structure close to the upper surface of the substrate; and a common source region located on the other side of the first polysilicon layer just opposite the drain region such that the common source region at least includes a source region and a buried metallic layer alternately linked together.
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