发明授权
US06285049B1 Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3
失效
BaxSryCa1-x-yTiO3的低损耗组成：Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3
- 专利标题： Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3
- 专利标题（中）： BaxSryCa1-x-yTiO3的低损耗组成：Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3
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申请号： US09671179申请日： 2000-09-28
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公开(公告)号： US06285049B1公开(公告)日： 2001-09-04
- 发明人: Xiao-Dong Xiang , Hauyee Chang , Ichiro Takeuchi
- 申请人： Xiao-Dong Xiang , Hauyee Chang , Ichiro Takeuchi
- 主分类号： H01L2976
- IPC分类号： H01L2976
摘要：
A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (BaxSryCa1−x−y)TiO3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.
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