发明授权
- 专利标题: Method for removing dust
- 专利标题(中): 除尘方法
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申请号: US09425693申请日: 1999-10-22
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公开(公告)号: US06287528B1公开(公告)日: 2001-09-11
- 发明人: Martin Weber
- 申请人: Martin Weber
- 优先权: DE19854235 19981124
- 主分类号: B01D5334
- IPC分类号: B01D5334
摘要:
A method for removing combustible, metallurgical dust out of the exhaust gas from installations for drawing single silicon crystals is provided. The dust contaminated exhaust gas and a reactive gas, such as air, oxygen or ozone, are fed into a reactor operated at a temperature of 50 to 500° C. where the reactive gas combusts the dust to form solid products. The reactor may be equipped with a catalyst, such as nickel, palladium or platinum, to promote the reaction. The solid products-containing exhaust gas is passed through a filter. By combusting the dust in the reactor, spontaneous explosions can be minimized.
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