发明授权
US06291797B1 Laser machining method for glass substrate, diffraction type optical device fabricated by the machining method, and method of manufacturing optical device
失效
用于玻璃基板的激光加工方法，通过加工方法制造的衍射型光学器件以及制造光学器件的方法
- 专利标题： Laser machining method for glass substrate, diffraction type optical device fabricated by the machining method, and method of manufacturing optical device
- 专利标题（中）： 用于玻璃基板的激光加工方法，通过加工方法制造的衍射型光学器件以及制造光学器件的方法
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申请号： US09284269申请日： 1999-06-04
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公开(公告)号： US06291797B1公开(公告)日： 2001-09-18
- 发明人: Tadashi Koyama , Keiji Tsunetomo
- 申请人： Tadashi Koyama , Keiji Tsunetomo
- 优先权： JP8-213391 19960813; JP8-213392 19960813
- 主分类号： B23K2602
- IPC分类号： B23K2602
摘要：
In a laser processing method for accurately forming a convexo-concave structure on the surface of a glass substrate, a periodic optical intensity distribution of a laser beam is obtained by an interference between diffracted light beams of +1 degree and −1 degree emitted from a phase mask, onto which the laser beam is irradiated, in the vicinity of the emission side of the phase mask, and a glass substrate, on which a thin film is formed, is set in the area where the periodic optical intensity distribution is provided. As a result, the thin film is evaporated or ablated depending on the periodic optical intensity, thereby a diffraction grating, which has the same period as that of the varying optical intensity, is formed on the glass substrate.