发明授权
US06293109B1 Pulse pipe refrigerating machine and cryopump using the refrigerating machine 有权
脉冲管冰箱和低温泵使用相同

Pulse pipe refrigerating machine and cryopump using the refrigerating machine
摘要:
A pulse tube refrigerator which enables holding a cooling temperature without the use of a heater and the like. The pulse tube refrigerator employs a working gas which has a liquefying temperature within the range of an operating temperature of the pulse tube refrigerator.
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