发明授权
- 专利标题: Pulse pipe refrigerating machine and cryopump using the refrigerating machine
- 专利标题(中): 脉冲管冰箱和低温泵使用相同
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申请号: US09485491申请日: 2000-02-11
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公开(公告)号: US06293109B1公开(公告)日: 2001-09-25
- 发明人: Atsushi Miyamoto , Yasuhiro Kakimi , Shingo Kunitani , Daisuke Ito
- 申请人: Atsushi Miyamoto , Yasuhiro Kakimi , Shingo Kunitani , Daisuke Ito
- 优先权: JP10-165596 19980612
- 主分类号: F25B900
- IPC分类号: F25B900
摘要:
A pulse tube refrigerator which enables holding a cooling temperature without the use of a heater and the like. The pulse tube refrigerator employs a working gas which has a liquefying temperature within the range of an operating temperature of the pulse tube refrigerator.
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