发明授权
- 专利标题: Optical alignment of superpositioned objects
- 专利标题(中): 重叠对象的光学对齐
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申请号: US08476178申请日: 1995-06-07
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公开(公告)号: US06295128B1公开(公告)日: 2001-09-25
- 发明人: Raymond Robert Horton , Chandrasekhar Narayan , Michael Jon Palmer
- 申请人: Raymond Robert Horton , Chandrasekhar Narayan , Michael Jon Palmer
- 主分类号: G01B1100
- IPC分类号: G01B1100
摘要:
In alignment of superpositioned objects on opposing substrates accuracy and simplicity is achieved through relative movement of the substrates responsive to an image of one object reflected from the surface of the opposite substrate. Alignment of mating fine pitch conductors and pads for bonding is achieved by observation of the reflection of one conductor or pad in the surface of the opposite substrate and relatively moving the substrates to eliminate the reflection.