发明授权
US06295128B1 Optical alignment of superpositioned objects 失效
重叠对象的光学对齐

Optical alignment of superpositioned objects
摘要:
In alignment of superpositioned objects on opposing substrates accuracy and simplicity is achieved through relative movement of the substrates responsive to an image of one object reflected from the surface of the opposite substrate. Alignment of mating fine pitch conductors and pads for bonding is achieved by observation of the reflection of one conductor or pad in the surface of the opposite substrate and relatively moving the substrates to eliminate the reflection.
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