发明授权
- 专利标题： Analysis system and method for water-soluble contaminants in a cleanroom environment
- 专利标题（中）： 洁净室环境中水溶性污染物的分析系统和方法
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申请号： US09236545申请日： 1999-01-26
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公开(公告)号： US06295864B1公开(公告)日： 2001-10-02
- 发明人: Nam-hee You , Soon-young Lee , Jung-sung Hwang , Kwang-young Kim
- 申请人： Nam-hee You , Soon-young Lee , Jung-sung Hwang , Kwang-young Kim
- 优先权： KR98-10819 19980327
- 主分类号： G01N1100
- IPC分类号： G01N1100
摘要：
An analysis system and method for a cleanroom environment is disclosed wherein on-line testing of water-soluble contaminants is performed by condensing water vapor from an air sample taken from the clean room. The condenser is connected to a analyzing unit that is used to measure and analyze the water-soluble contaminants in the condensed water received from the condensing unit.
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