发明授权
- 专利标题: Pretreatment process for a surface texturing process
- 专利标题(中): 表面纹理过程的预处理过程
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申请号: US08427462申请日: 1995-04-24
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公开(公告)号: US06296740B1公开(公告)日: 2001-10-02
- 发明人: Chenggang Xie , Dean Joseph Eichman
- 申请人: Chenggang Xie , Dean Joseph Eichman
- 主分类号: C23C1434
- IPC分类号: C23C1434
摘要:
Before submitting a sample, including a first material layered upon a substrate, to an ion milling process, whereby a second material is sputtered onto the surface of the first material and the sample is then submitted to an etching process, an irregularity is formed on the surface of the first material. The overall process results in the formation of cones, or micro-tip structures, which may then be layered with a layer of low work function material, such as amorphous diamond. The irregularity in the surface of the first material may be formed by polishing, sandblasting, photolithography, or mechanical means such as scratching.
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