Invention Grant
- Patent Title: Method of fabricating a sensor
- Patent Title (中): 制造传感器的方法
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Application No.: US09255236Application Date: 1999-02-22
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Publication No.: US06296779B1Publication Date: 2001-10-02
- Inventor: William A. Clark , Thor Juneau , Roger T. Howe
- Applicant: William A. Clark , Thor Juneau , Roger T. Howe
- Main IPC: C03C1500
- IPC: C03C1500
Abstract:
A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio.
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