发明授权
- 专利标题: Apparatus and method for dressing a wafer polishing pad
- 专利标题(中): 用于修整晶片抛光垫的装置和方法
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申请号: US09538506申请日: 2000-03-30
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公开(公告)号: US06302772B1公开(公告)日: 2001-10-16
- 发明人: Kanji Hosoki , Hiroshi Shibaya , Masahito Komasaki , Jiro Sano , Hiroyuki Kobayashi
- 申请人: Kanji Hosoki , Hiroshi Shibaya , Masahito Komasaki , Jiro Sano , Hiroyuki Kobayashi
- 优先权: JP11-095565 19990401; JP11-283560 19991004
- 主分类号: B24B100
- IPC分类号: B24B100
摘要:
An apparatus for dressing a wafer polishing pad, including a disk-shaped dresser, an arm, and a control unit. The disk-shaped dresser is configured to be pressed against the polishing pad which rotates in a circumferential direction. The dresser is configured to rotate in a same direction as the polishing pad rotates due to frictional force generated between the dresser and the polishing pad. The arm is configured to support the dresser rotatably and to press the dresser against the polishing pad. The control unit is configured to control the arm to position the dresser such that a peripheral edge portion of the dresser is positioned outside a peripheral edge portion of the polishing pad by a predetermined distance.
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